In this study, we present nanodomes-combined surface relief gratings (SRGs) of azopolymer films with controlled shapes and sizes. We investigate the effect of the polarization mode of light interference on leading nanodomes in the conventional SRG patterns. In addition, we also systematically study the relationship between Bragg distance of light interference and shapes of nanodomes. From this, we explain the anisotropic self-assembled behavior nanodomes in photoaddressable azopolymer films regarding polarization modes as well as spatial confinement effect. © 2019 Wiley Periodicals, Inc. J. Polym. Sci., Part B: Polym. Phys. 2019, 57, 731–737